@phdthesis{https://doi.org/10.22029/jlupub-9736, doi = {10.22029/JLUPUB-9736}, url = {https://jlupub.ub.uni-giessen.de//handle/jlupub/10352}, author = {Becker, Martin and {Justus Liebig University Giessen}}, keywords = {Ionenstrahlsputterdeposition, Zinnoxid, Kompositionsgradient, ion beam sputter deposition, tin oxide, compositional spread, ddc:530}, language = {de}, title = {Ionenstrahlsputterdeposition von Metalloxiden}, publisher = {Universitätsbibliothek Gießen}, year = {2016}, copyright = {In Copyright} }