10.7795/810.20180323F
Thalmann, Rudolf
Rudolf
Thalmann
Federal Institute of Metrology METAS, Bern-Wabern, Switzerland
Küng, Alain
Alain
Küng
Federal Institute of Metrology METAS, Bern-Wabern, Switzerland
Nicolet, Anaïs
Anaïs
Nicolet
Federal Institute of Metrology METAS, Bern-Wabern, Switzerland
Meli, Felix
Felix
Meli
0000-0001-7575-7540
Federal Institute of Metrology METAS, Bern-Wabern, Switzerland
Battagli, Christoph
Christoph
Battagli
NTB Interstaatliche Hochschule für Technik Buchs, Institut PWO, Buchs, Switzerland
Marxer, Michael
Michael
Marxer
NTB Interstaatliche Hochschule für Technik Buchs, Institut PWO, Buchs, Switzerland
Jordi, Thomas
Thomas
Jordi
Saphirwerk AG, Brügg, Switzerland
Versatile calibration artefact for optical micro-CMMs based on micro-spheres with engineered surface texture
Physikalisch-Technische Bundesanstalt (PTB)
2018
en
Physikalisch-Technische Bundesanstalt (PTB)
0000 0001 2186 1887
2017-12-21
2018-03-28
536115 bytes
6 pages
application/pdf
CC BY 4.0
Article
For the calibration and performance verification of optical micro coordinate measuring machines we have developed an artefact which is based on small spherical elements with optically cooperative surfaces. It is in fact a three-dimensional ball plate with a number of different micro-spheres arranged on an amphitheatre-like glass substrate. The micro-spheres were produced with an adequate quality in terms of roughness and sphericity and an engineered surface texture, which is optically cooperative and thus suitable for optical sensors based on focus variation, chromatic, confocal or astigmatic sensor principles. The application of the calibration artefact allows to evaluate instrument parameters such as volumetric length measurement errors, calibration factors of the three axes separately, orthogonality errors between all three axes, alignment errors of the optical sensor with respect to the instrument axes, as well as scale and form errors of the optical sensor.
This article is based on a presentation at the conference "MacroScale 2017 - Recent developments in traceable dimensional measurements", VTT MIKES Espoo, (Finnland), 17th-19th October 2017.
optical micro-CMM
micro-sphere
calibration artefact