10.7795/530.20190424A
Spirito, Marco
Marco
Spirito
Delft University of Technology, Delft, THE NETHERLANDS
Arz, Uwe
Uwe
Arz
0000-0003-0372-2626
Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder
Phung, Gia Ngoc
Gia Ngoc
Phung
0000-0001-7157-1263
Ferdinand-Braun-Institut für Höchstfrequenztechnik (FBH), Berlin
Schmückle, Franz Josef
Franz Josef
Schmückle
0000-0001-5322-2713
Ferdinand-Braun-Institut für Höchstfrequenztechnik (FBH), Berlin
Heinrich, Wolfgang
Wolfgang
Heinrich
Ferdinand-Braun-Institut für Höchstfrequenztechnik (FBH), Berlin
Lozar, Roger
Roger
Lozar
Fraunhofer Institute for Applied Solid State Physics, Freiburg
Guidelines for the design of calibration substrates, including the suppression of parasitic modes for frequencies up to and including 325 GHz : EMPIR 14IND02
Physikalisch-Technische Bundesanstalt (PTB)
2019
en
Physikalisch-Technische Bundesanstalt (PTB)
0000 0001 2186 1887
2018-07
2019-04-24
2385098 bytes
31 pages
application/pdf
CC BY 4.0
Guide
The scope of this guideline is to make the reader aware of the constraints arising when attempting probe level calibration at higher frequencies, especially above 110GHz. The causes of generation of un-wanted radiation modes are first briefly described, and an approach to identify their impact on the calibration quality is provided to the reader with general first order guidelines. The report then describes the approaches that have been investigated and quantified as viable methods to reduce the generation of unwanted modes. Finally, an example of a custom built Thru Reflect Line (TRL) kit with suggestions on how to create the lines and the reflect conditions are given for illustrative purposes.
Calibration
coplanar waveguide (CPW)
electromagnetic field simulation
parasitic modes
substrate modes
multiline-thru-reflect-line (mTRL)
on-wafer probing
probes