10.25676/11124/170959
Ovanesyan, Rafaiel A.
Rafaiel A.
Ovanesyan
Leick, Noemi
Noemi
Leick
Kelchner, Kathryn M.
Kathryn M.
Kelchner
Hausmann, Dennis M.
Dennis M.
Hausmann
Agarwal, Sumit
Sumit
Agarwal
Identification of the carbon incorporation mechanism during atomic layer deposition of SiCxNy using in situ ATR-FTIR spectroscopy
Mountain Scholar
2017
StillImage
Colorado School Of Mines. Arthur Lakes Library
Colorado School Of Mines. Arthur Lakes Library
Agarwal, Sumit
Sumit
Agarwal
2017-05-02
2017-05-02
2017
en
http://hdl.handle.net/11124/170959
http://dx.doi.org/10.25676/11124/170959
posters
Copyright of the original work is retained by the author.