{"data":{"id":"10.6084/m9.figshare.c.3944680","type":"dois","attributes":{"doi":"10.6084/m9.figshare.c.3944680","prefix":"10.6084","suffix":"m9.figshare.c.3944680","identifiers":[],"alternateIdentifiers":[],"creators":[{"name":"Feng, Guo-Hua","nameType":"Personal","givenName":"Guo-Hua","familyName":"Feng","affiliation":[],"nameIdentifiers":[]},{"name":"Kuan-Yi Lee","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Supplementary material from \"Hydrothermally synthesized PZT film grown in highly concentrated KOH solution with large electromechanical coupling coefficient for resonator\""}],"publisher":"Figshare","container":{},"publicationYear":2017,"subjects":[{"subject":"90499 Chemical Engineering not elsewhere classified","subjectScheme":"FOR"},{"subject":"FOS: Chemical engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"90699 Electrical and Electronic Engineering not elsewhere classified","subjectScheme":"FOR"},{"subject":"FOS: Electrical engineering, electronic engineering, information engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"30399 Macromolecular and Materials Chemistry not elsewhere classified","subjectScheme":"FOR"},{"subject":"FOS: Chemical sciences","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"}],"contributors":[],"dates":[{"date":"2017-12-02","dateType":"Created"},{"date":"2017-12-02","dateType":"Updated"},{"date":"2017","dateType":"Issued"}],"language":null,"types":{"ris":"GEN","bibtex":"misc","citeproc":"article","schemaOrg":"Collection","resourceType":"Collection","resourceTypeGeneral":"Collection"},"relatedIdentifiers":[{"relationType":"IsSupplementTo","relatedIdentifier":"10.1098/rsos.171363","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":[],"formats":[],"version":null,"rightsList":[{"rights":"CC BY 4.0","rightsUri":"https://creativecommons.org/licenses/by/4.0"}],"descriptions":[{"description":"This paper presents the study of lead zirconate titanate (PZT) films hydrothermally grown on the dome-shaped titanium diaphragm. Few articles in the literature address the implementation of hydrothermal PZT films on curved-diaphragm substrates for resonators. In this study, a 50-μm-thick titanium sheet is embossed using balls of designed dimensions to shape a dome-shaped cavity array. Through single-process hydrothermal synthesis, PZT films are grown on both sides of the processed titanium diaphragm with good adhesion and uniformity. The hydrothermal synthesis process involves a high concentration of potassium hydroxide solution and excess amounts of lead acetate and zirconium oxychlorideoctahydrate. Varied deposition times and temperatures of PZT films are investigated. The grown films are characterized by X-ray diffraction and scanning electron microscopy. The 10-μm-thick PZT dome-shaped resonators with 60- and 20-μm-thick supporting layers are implemented and further tested. Results for both resonators indicate that large electromechanical coupling coefficients and a series resonance of 95 MHz from 14 MHz can be attained. The device is connected to a complementary metal oxide–semiconductor integrated circuit for analysis of oscillator applications. The oscillator reaches a \u003ci\u003eQ\u003c/i\u003e value of 6300 in air. The resonator exhibits a better sensing stability when loaded with water when compared with air.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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","url":"https://figshare.com/collections/Supplementary_material_from_Hydrothermally_synthesized_PZT_film_grown_in_highly_concentrated_KOH_solution_with_large_electromechanical_coupling_coefficient_for_resonator_/3944680","contentUrl":null,"metadataVersion":2,"schemaVersion":"http://datacite.org/schema/kernel-4","source":"api","isActive":true,"state":"findable","reason":null,"viewCount":0,"viewsOverTime":[],"downloadCount":0,"downloadsOverTime":[],"referenceCount":1,"citationCount":0,"citationsOverTime":[],"partCount":0,"partOfCount":0,"versionCount":0,"versionOfCount":0,"created":"2017-12-02T10:50:31.000Z","registered":"2017-12-02T10:50:32.000Z","published":"2017","updated":"2024-12-18T21:42:37.000Z"},"relationships":{"client":{"data":{"id":"figshare.ars","type":"clients"}},"provider":{"data":{"id":"otjm","type":"providers"}},"media":{"data":{"id":"10.6084/m9.figshare.c.3944680","type":"media"}},"references":{"data":[{"id":"10.1098/rsos.171363","type":"dois"}]},"citations":{"data":[]},"parts":{"data":[]},"partOf":{"data":[]},"versions":{"data":[]},"versionOf":{"data":[]}}}}