{"data":{"id":"10.6084/m9.figshare.c.3925897","type":"dois","attributes":{"doi":"10.6084/m9.figshare.c.3925897","prefix":"10.6084","suffix":"m9.figshare.c.3925897","identifiers":[],"alternateIdentifiers":[],"creators":[{"name":"Udupa, Aditi","nameType":"Personal","givenName":"Aditi","familyName":"Udupa","affiliation":[],"nameIdentifiers":[]},{"name":"Yu, Xin","nameType":"Personal","givenName":"Xin","familyName":"Yu","affiliation":[],"nameIdentifiers":[]},{"name":"Edwards, Lonna","nameType":"Personal","givenName":"Lonna","familyName":"Edwards","affiliation":[],"nameIdentifiers":[]},{"name":"Lynford Goddard","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Selective area formation of arsenic oxide-rich octahedral microcrystals during photochemical etching of n-type GaAs"}],"publisher":"Figshare","container":{},"publicationYear":2018,"subjects":[{"subject":"91203 Compound Semiconductors","subjectScheme":"FOR"},{"subject":"FOS: Materials engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"30303 Optical Properties of Materials","subjectScheme":"FOR"},{"subject":"FOS: Chemical sciences","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"}],"contributors":[],"dates":[{"date":"2017-11-09","dateType":"Created"},{"date":"2018-01-09","dateType":"Updated"},{"date":"2018","dateType":"Issued"}],"language":null,"types":{"ris":"GEN","bibtex":"misc","citeproc":"article","schemaOrg":"Collection","resourceType":"Collection","resourceTypeGeneral":"Collection"},"relatedIdentifiers":[{"relationType":"IsSupplementTo","relatedIdentifier":"10.1364/ome.8.000289","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":[],"formats":[],"version":null,"rightsList":[{"rights":"CC BY 4.0","rightsUri":"https://creativecommons.org/licenses/by/4.0"}],"descriptions":[{"description":"We demonstrate the formation of octahedral microcrystals in selective areas of highly doped n-type GaAs substrates during rapid digital projection photochemical (PC) etching with sulfuric acid. These crystal-like octahedral structures grow to various sizes ranging from 5 micron to 100 micron depending on the time of etch. The structures have also been observed to form only in illuminated regions that have a large enough area. Substrate quality also affects the nature of microcrystal formation. Individual microcrystals were observed for prime grade wafers while a network of microcrystalline features was observed for mechanical grade wafers.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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","url":"https://figshare.com/collections/Selective_area_formation_of_arsenic_oxide-rich_octahedral_microcrystals_during_photochemical_etching_of_n-type_GaAs/3925897","contentUrl":null,"metadataVersion":3,"schemaVersion":"http://datacite.org/schema/kernel-4","source":"api","isActive":true,"state":"findable","reason":null,"viewCount":0,"viewsOverTime":[],"downloadCount":0,"downloadsOverTime":[],"referenceCount":1,"citationCount":0,"citationsOverTime":[],"partCount":0,"partOfCount":0,"versionCount":0,"versionOfCount":0,"created":"2018-01-09T15:45:12.000Z","registered":"2018-01-09T15:45:13.000Z","published":"2018","updated":"2024-12-12T11:16:27.000Z"},"relationships":{"client":{"data":{"id":"figshare.ars","type":"clients"}},"provider":{"data":{"id":"otjm","type":"providers"}},"media":{"data":{"id":"10.6084/m9.figshare.c.3925897","type":"media"}},"references":{"data":[{"id":"10.1364/ome.8.000289","type":"dois"}]},"citations":{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