{"data":{"id":"10.6084/m9.figshare.8127779.v1","type":"dois","attributes":{"doi":"10.6084/m9.figshare.8127779.v1","prefix":"10.6084","suffix":"m9.figshare.8127779.v1","identifiers":[],"alternateIdentifiers":[],"creators":[{"name":"Chaves, Michel","nameType":"Personal","givenName":"Michel","familyName":"Chaves","affiliation":[],"nameIdentifiers":[]},{"name":"Ramos, Raul","nameType":"Personal","givenName":"Raul","familyName":"Ramos","affiliation":[],"nameIdentifiers":[]},{"name":"Everson Martins","affiliation":[],"nameIdentifiers":[]},{"name":"Elidiane Cipriano Rangel","affiliation":[],"nameIdentifiers":[]},{"name":"Nilson Cristino Da Cruz","affiliation":[],"nameIdentifiers":[]},{"name":"Durrant, Steven Frederick","nameType":"Personal","givenName":"Steven Frederick","familyName":"Durrant","affiliation":[],"nameIdentifiers":[]},{"name":"Bortoleto, José Roberto Ribeiro","nameType":"Personal","givenName":"José Roberto Ribeiro","familyName":"Bortoleto","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Al-doping and Properties of AZO Thin Films Grown at Room Temperature: Sputtering Pressure Effect"}],"publisher":"SciELO journals","container":{},"publicationYear":2019,"subjects":[{"subject":"90499 Chemical Engineering not elsewhere classified","subjectScheme":"FOR"},{"subject":"FOS: Chemical engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Chemical engineering","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"91207 Metals and Alloy Materials","subjectScheme":"FOR"},{"subject":"FOS: Materials engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Materials engineering","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"91299 Materials Engineering not elsewhere classified","subjectScheme":"FOR"}],"contributors":[],"dates":[{"date":"2019-05-15","dateType":"Created"},{"date":"2019-05-15","dateType":"Updated"},{"date":"2019","dateType":"Issued"}],"language":null,"types":{"ris":"DATA","bibtex":"misc","citeproc":"dataset","schemaOrg":"Dataset","resourceType":"Dataset","resourceTypeGeneral":"Dataset"},"relatedIdentifiers":[{"relationType":"IsSupplementTo","relatedIdentifier":"10.1590/1980-5373-mr-2018-0665","relatedIdentifierType":"DOI"},{"relationType":"IsIdenticalTo","relatedIdentifier":"10.6084/m9.figshare.8127779","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":["552520 Bytes"],"formats":[],"version":null,"rightsList":[{"rights":"Creative Commons Attribution 4.0 International","rightsUri":"https://creativecommons.org/licenses/by/4.0/legalcode","schemeUri":"https://spdx.org/licenses/","rightsIdentifier":"cc-by-4.0","rightsIdentifierScheme":"SPDX"}],"descriptions":[{"description":"Aluminum zinc oxide (AZO) thin films were synthesized on glass substrates by radio frequency (rf) magnetron sputtering from a metallic Zn-Al (5 at. %) target at room temperature. The morphological, structural, electrical and optical properties of the films were studied as a function of the sputtering pressure, which was varied from 0.1 to 6.7 Pa. X-ray diffraction (XRD) analyses revealed that the films obtained were polycrystalline, having a hexagonal wurtzite structure with a preferential orientation in the (002) plane. In addition, the crystallite size increased as a function of sputtering pressure. Owing to the re-sputtering of the Zn atoms from the growing film, the aluminum concentration presented a maximum value of 13 at. %. At pressures close to 0.16 Pa, we obtained films with values of electrical resistivity and mobility of 2.8 10-3 Ω cm and 17 cm2/Vs, respectively. Finally, our results indicate that the structure zone diagram proposed by Thornton and later modified by Kluth does not fully predict the structural/morphological behavior of the AZO films, since plasma interactions must also be taken into account. With the methodology used, transparent conductive electrodes can be deposited on substrates at low temperatures.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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