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Depending on the oxygen percentage in the mixture, the obtained Si nanostructures were characterized for their different properties: etching rate, morphology, optical reflectance, photoluminescence, spectral response and humidity sensing. It is found that the etching rate exhibits a maximum value when the O2 ratio reaches 5%. An interesting defect-induced \"violet\" luminescence is reported from the Si nanostructures, whose intensity depends on their density. The obtained Si nanostructures have shown to induce a spectral response (SR) enhancement, in comparison with a smooth Si substrate, of about 100 times at 1100 nm wavelength. A very short response time (1 sec) to the humidity was measured for 5% O2 in the SF6/O2 plasma mixture, which was found to be well-correlated with the porosity of the Si nanostructures.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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","url":"https://scielo.figshare.com/articles/Silicon_Nanostructuring_Using_SF6_O2_Downstram_Plasma_Etching_Morphological_Optical_and_Sensing_Properties/6832166/1","contentUrl":null,"metadataVersion":2,"schemaVersion":"http://datacite.org/schema/kernel-4","source":"mds","isActive":true,"state":"findable","reason":null,"viewCount":2,"viewsOverTime":[{"yearMonth":"2025-05","total":1},{"yearMonth":"2025-05","total":1}],"downloadCount":0,"downloadsOverTime":[{"yearMonth":"2025-05","total":0},{"yearMonth":"2025-05","total":0}],"referenceCount":1,"citationCount":0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