{"data":{"id":"10.6084/m9.figshare.6387929","type":"dois","attributes":{"doi":"10.6084/m9.figshare.6387929","prefix":"10.6084","suffix":"m9.figshare.6387929","identifiers":[],"alternateIdentifiers":[],"creators":[{"name":"Ling-Chi Kuo","affiliation":[],"nameIdentifiers":[]},{"name":"Huang-Wei Pan","affiliation":[],"nameIdentifiers":[]},{"name":"Huang, Shu-Yu","nameType":"Personal","givenName":"Shu-Yu","familyName":"Huang","affiliation":[],"nameIdentifiers":[]},{"name":"Shiuh Chao","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Mechanical Loss Angle Measurement for Stressed thin Film Using Cantilever Ring-Down Method"}],"publisher":"SciELO journals","container":{},"publicationYear":2018,"subjects":[{"subject":"90499 Chemical Engineering not elsewhere classified","subjectScheme":"FOR"},{"subject":"FOS: Chemical engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Chemical engineering","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"91207 Metals and Alloy Materials","subjectScheme":"FOR"},{"subject":"FOS: Materials engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Materials engineering","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"91299 Materials Engineering not elsewhere classified","subjectScheme":"FOR"}],"contributors":[],"dates":[{"date":"2018-05-30","dateType":"Created"},{"date":"2018-05-30","dateType":"Updated"},{"date":"2018","dateType":"Issued"}],"language":null,"types":{"ris":"DATA","bibtex":"misc","citeproc":"dataset","schemaOrg":"Dataset","resourceType":"Dataset","resourceTypeGeneral":"Dataset"},"relatedIdentifiers":[{"relationType":"IsSupplementTo","relatedIdentifier":"10.1590/1980-5373-mr-2017-0869","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":["564046 Bytes"],"formats":[],"version":null,"rightsList":[{"rights":"Creative Commons Attribution 4.0 International","rightsUri":"https://creativecommons.org/licenses/by/4.0/legalcode","schemeUri":"https://spdx.org/licenses/","rightsIdentifier":"cc-by-4.0","rightsIdentifierScheme":"SPDX"}],"descriptions":[{"description":"Mechanical loss of the coating materials, and hence thermal noise from the mirror coatings, is a limiting factor for the sensitivity of the laser interferometer gravitational waves detector at its most sensitive frequency range. Mechanical loss of the thin films are often measured using the cantilever ring-down method. But when the thin film is under stress, the regular ring-down method gives incorrect results. We report a method to obtain the mechanical loss of stressed thin film using the cantilever ring-down technique. A proof-of-concept example is given to demonstrate and verify our method. The method can also be applied to obtain the mechanical loss angle of a rough interface; an example showed that loss angle of the interface between silicon nitride film deposited by plasma enhanced chemical vapor deposition method and silicon substrate is highly frequency dependent.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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","url":"https://scielo.figshare.com/articles/Mechanical_Loss_Angle_Measurement_for_Stressed_thin_Film_Using_Cantilever_Ring-Down_Method/6387929","contentUrl":null,"metadataVersion":2,"schemaVersion":"http://datacite.org/schema/kernel-4","source":"mds","isActive":true,"state":"findable","reason":null,"viewCount":0,"viewsOverTime":[],"downloadCount":0,"downloadsOverTime":[],"referenceCount":0,"citationCount":0,"citationsOverTime":[],"partCount":0,"partOfCount":0,"versionCount":0,"versionOfCount":0,"created":"2018-05-30T02:40:45.000Z","registered":"2018-05-30T02:40:45.000Z","published":"2018","updated":"2020-08-29T15:00:12.000Z"},"relationships":{"client":{"data":{"id":"figshare.ars","type":"clients"}},"provider":{"data":{"id":"otjm","type":"providers"}},"media":{"data":{"id":"10.6084/m9.figshare.6387929","type":"media"}},"references":{"data":[]},"citations":{"data":[]},"parts":{"data":[]},"partOf"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