{"data":{"id":"10.6084/m9.figshare.4954523","type":"dois","attributes":{"doi":"10.6084/m9.figshare.4954523","prefix":"10.6084","suffix":"m9.figshare.4954523","identifiers":[],"alternateIdentifiers":[],"creators":[{"name":"Alkisti Gkouzou","affiliation":[],"nameIdentifiers":[]},{"name":"Kokorian, Jaap","nameType":"Personal","givenName":"Jaap","familyName":"Kokorian","affiliation":[],"nameIdentifiers":[]},{"name":"Janssen, Guido C.A.M.","nameType":"Personal","givenName":"Guido C.A.M.","familyName":"Janssen","affiliation":[],"nameIdentifiers":[]},{"name":"W. Merlijn Van Spengen","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Temperature calibration, normal force measurements, undisturbed motion measurements, and stick-slip motion cycles in MEMS devices with sliding sidewall surfaces"}],"publisher":"figshare","container":{},"publicationYear":2017,"subjects":[{"subject":"91309 Tribology","subjectScheme":"FOR"},{"subject":"FOS: Mechanical engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Mechanical engineering","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"91306 Microelectromechanical Systems (MEMS)","subjectScheme":"FOR"}],"contributors":[],"dates":[{"date":"2017-04-28","dateType":"Created"},{"date":"2017-04-29","dateType":"Updated"},{"date":"2017","dateType":"Issued"}],"language":null,"types":{"ris":"DATA","bibtex":"misc","citeproc":"dataset","schemaOrg":"Dataset","resourceType":"Dataset","resourceTypeGeneral":"Dataset"},"relatedIdentifiers":[],"relatedItems":[],"sizes":["4764502949 Bytes"],"formats":[],"version":null,"rightsList":[{"rights":"Creative Commons Attribution 4.0 International","rightsUri":"https://creativecommons.org/licenses/by/4.0/legalcode","schemeUri":"https://spdx.org/licenses/","rightsIdentifier":"cc-by-4.0","rightsIdentifierScheme":"SPDX"}],"descriptions":[{"description":"This .zip file contains research data sets acquired to investigate the temperature dependence of friction in MEMS devices with sidewall surfaces subject to frictional contact. 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