{"data":{"id":"10.5258/soton/388275","type":"dois","attributes":{"doi":"10.5258/soton/388275","prefix":"10.5258","suffix":"soton/388275","identifiers":[],"alternateIdentifiers":[],"creators":[{"name":"Fan, Junqing","nameType":"Personal","givenName":"Junqing","familyName":"Fan","affiliation":[],"nameIdentifiers":[]},{"name":"Jiang, Liudi","nameType":"Personal","givenName":"Liudi","familyName":"Jiang","affiliation":[],"nameIdentifiers":[]},{"name":"Zhong, Le","nameType":"Personal","givenName":"Le","familyName":"Zhong","affiliation":[],"nameIdentifiers":[]},{"name":"Gowers, Robert","nameType":"Personal","givenName":"Robert","familyName":"Gowers","affiliation":[],"nameIdentifiers":[]},{"name":"Morgan, Katrina","nameType":"Personal","givenName":"Katrina","familyName":"Morgan","affiliation":[],"nameIdentifiers":[]},{"name":"De Groot, C.H.","nameType":"Personal","givenName":"C.H.","familyName":"De Groot","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Microstructure and electrical properties of co-sputtered Cu embedded amorphous SiC"}],"publisher":"University of Southampton","container":{},"publicationYear":2015,"subjects":[{"subject":"Faculty of Engineering and the Environment: Engineering Materials"},{"subject":"Surface Engineering"},{"subject":"Materials Engineering"},{"subject":"FOS: Materials engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"Materials Science"},{"subject":"EDS"},{"subject":"XRD"},{"subject":"SET"},{"subject":"Resistance"},{"subject":"Van de Paul"},{"subject":"Capacitance,"},{"subject":"Current density-Voltage"}],"contributors":[],"dates":[{"date":"2015","dateType":"Issued"}],"language":"en","types":{"ris":"DATA","bibtex":"misc","citeproc":"dataset","schemaOrg":"Dataset","resourceType":"Code","resourceTypeGeneral":"Dataset"},"relatedIdentifiers":[],"relatedItems":[],"sizes":[],"formats":[],"version":null,"rightsList":[],"descriptions":[{"description":"Dataset of figures in the paper \"Microstructure and electrical properties of co-sputtered Cu embedded amorphous SiC\". These dataset including EDS, XRD, SEM, low-temperature resistance, resistivity measurements on a-SiC:Cu films and capcitance and current density-voltage measurements on Cu/a-SiC:Cu/Au microcapacitors.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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","url":"http://eprints.soton.ac.uk/388275/","contentUrl":null,"metadataVersion":0,"schemaVersion":null,"source":null,"isActive":true,"state":"findable","reason":null,"viewCount":0,"viewsOverTime":[],"downloadCount":0,"downloadsOverTime":[],"referenceCount":0,"citationCount":0,"citationsOverTime":[],"partCount":0,"partOfCount":0,"versionCount":0,"versionOfCount":0,"created":"2016-04-25T12:48:33.000Z","registered":"2016-04-25T12:48:32.000Z","published":"2015","updated":"2020-09-18T10:16:36.000Z"},"relationships":{"client":{"data":{"id":"bl.soton","type":"clients"}},"provider":{"data":{"id":"hxhf","type":"providers"}},"media":{"data":{"id":"10.5258/soton/388275","type":"media"}},"references":{"data":[]},"citations":{"data":[]},"parts":{"data":[]},"partOf":{"data":[]},"versions":{"data":[]},"versionOf":{"data":[]}}}}