{"data":{"id":"10.48550/arxiv.quant-ph/9912052","type":"dois","attributes":{"doi":"10.48550/arxiv.quant-ph/9912052","prefix":"10.48550","suffix":"arxiv.quant-ph/9912052","identifiers":[{"identifier":"quant-ph/9912052","identifierType":"arXiv"}],"alternateIdentifiers":[{"alternateIdentifierType":"arXiv","alternateIdentifier":"quant-ph/9912052"}],"creators":[{"name":"Boto, Agedi N.","nameType":"Personal","givenName":"Agedi N.","familyName":"Boto","affiliation":[],"nameIdentifiers":[]},{"name":"Kok, Pieter","nameType":"Personal","givenName":"Pieter","familyName":"Kok","affiliation":[],"nameIdentifiers":[]},{"name":"Abrams, Daniel S.","nameType":"Personal","givenName":"Daniel S.","familyName":"Abrams","affiliation":[],"nameIdentifiers":[]},{"name":"Braunstein, Samuel L.","nameType":"Personal","givenName":"Samuel L.","familyName":"Braunstein","affiliation":[],"nameIdentifiers":[]},{"name":"Williams, Colin P.","nameType":"Personal","givenName":"Colin P.","familyName":"Williams","affiliation":[],"nameIdentifiers":[]},{"name":"Dowling, Jonathan P.","nameType":"Personal","givenName":"Jonathan P.","familyName":"Dowling","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat The Diffraction Limit"}],"publisher":"arXiv","container":{},"publicationYear":1999,"subjects":[{"lang":"en","subject":"Quantum Physics (quant-ph)","subjectScheme":"arXiv"},{"subject":"FOS: Physical sciences","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Physical sciences","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"}],"contributors":[],"dates":[{"date":"1999-12-11T02:03:29Z","dateType":"Submitted","dateInformation":"v1"},{"date":"2009-12-01T00:26:55Z","dateType":"Updated","dateInformation":"v1"},{"date":"2000-05-04T00:06:50Z","dateType":"Submitted","dateInformation":"v2"},{"date":"2010-04-09T00:01:03Z","dateType":"Updated","dateInformation":"v2"},{"date":"1999-12","dateType":"Available","dateInformation":"v1"},{"date":"1999","dateType":"Issued"}],"language":null,"types":{"ris":"RPRT","bibtex":"article","citeproc":"article-journal","schemaOrg":"ScholarlyArticle","resourceType":"Article","resourceTypeGeneral":"Text"},"relatedIdentifiers":[{"relationType":"IsVersionOf","relatedIdentifier":"10.1103/physrevlett.85.2733","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":[],"formats":[],"version":"2","rightsList":[{"rights":"Assumed arXiv.org perpetual, non-exclusive license to distribute this article for submissions made before January 2004","rightsUri":"http://arxiv.org/licenses/assumed-1991-2003/"}],"descriptions":[{"description":"Classical, interferometric, optical lithography is diffraction limited to writing features of a size lambda/2 or greater, where lambda is the optical wavelength. Using nonclassical photon number states, entangled N at a time, we show that it is possible to write features of minimum size lambda/(2N) in an N-photon absorbing substrate. This result surpasses the usual classical diffraction limit by a factor of N. Since the number of features that can be etched on a two-dimensional surface scales inversely as the square of the feature size, this allows one to write a factor of N^2 more elements on a semiconductor chip. A factor of N = 2 can be achieved easily with entangled photon pairs generated from optical parametric downconversion. It is shown how to write arbitrary 2D patterns by using this method.","descriptionType":"Abstract"},{"description":"9 pages, 2 figures","descriptionType":"Other"}],"geoLocations":[],"fundingReferences":[],"xml":"PD94bWwgdmVyc2lvbj0iMS4wIiBlbmNvZGluZz0idXRmLTgiPz4KPHJlc291cmNlIHhtbG5zPSJodHRwOi8vZGF0YWNpdGUub3JnL3NjaGVtYS9rZXJuZWwtNCIgeG1sbnM6eHNpPSJodHRwOi8vd3d3LnczLm9yZy8yMDAxL1hNTFNjaGVtYS1pbnN0YW5jZSIgeHNpOnNjaGVtYUxvY2F0aW9uPSJodHRwOi8vZGF0YWNpdGUub3JnL3NjaGVtYS9rZXJuZWwtNCBodHRwOi8vc2NoZW1hLmRhdGFjaXRlLm9yZy9tZXRhL2tlcm5lbC00LjMvbWV0YWRhdGEueHNkIj4KICA8aWRlbnRpZmllciBpZGVudGlmaWVyVHlwZT0iRE9JIj4xMC40ODU1MC9BUlhJVi5RVUFOVC1QSC85OTEyMDUyPC9pZGVudGlmaWVyPgogIDxhbHRlcm5hdGVJZGVudGlmaWVycz4KICAgIDxhbHRlcm5hdGVJZGVudGlmaWVyIGFsdGVybmF0ZUlkZW50aWZpZXJUeXBlPSJhclhpdiI+cXVhbnQtcGgvOTkxMjA1MjwvYWx0ZXJuYXRlSWRlbnRpZmllcj4KICA8L2FsdGVybmF0ZUlkZW50aWZpZXJzPgogIDxjcmVhdG9ycz4KICAgIDxjcmVhdG9yPgogICAgICA8Y3JlYXRvck5hbWUgbmFtZVR5cGU9IlBlcnNvbmFsIj5Cb3RvLCBBZ2VkaSBOLjwvY3JlYXRvck5hbWU+CiAgICAgIDxnaXZlbk5hbWU+QWdlZGkgTi48L2dpdmVuTmFtZT4KICAgICAgPGZhbWlseU5hbWU+Qm90bzwvZmFtaWx5TmFtZT4KICAgIDwvY3JlYXRvcj4KICAgIDxjcmVhdG9yPgogICAgICA8Y3JlYXRvck5hbWUgbmFtZVR5cGU9IlBlcnNvbmFsIj5Lb2ssIFBpZXRlcjwvY3JlYXRvck5hbWU+CiAgICAgIDxnaXZlbk5hbWU+UGlldGVyPC9naXZlbk5hbWU+CiAgICAgIDxmYW1pbHlOYW1lPktvazwvZmFtaWx5TmFtZT4KICAgIDwvY3JlYXRvcj4KICAgIDxjcmVhdG9yPgogICAgICA8Y3JlYXRvck5hbWUgbmFtZVR5cGU9IlBlcnNvbmFsIj5BYnJhbXMsIERhbmllbCBTLjwvY3JlYXRvck5hbWU+CiAgICAgIDxnaXZlbk5hbWU+RGFuaWVsIFMuPC9naXZlbk5hbWU+CiAgICAgIDxmYW1pbHlOYW1lPkFicmFtczwvZmFtaWx5TmFtZT4KICAgIDwvY3JlYXRvcj4KICAgIDxjcmVhdG9yPgogICAgICA8Y3JlYXRvck5hbWUgbmFtZVR5cGU9IlBlcnNvbmFsIj5CcmF1bnN0ZWluLCBTYW11ZWwgTC48L2NyZWF0b3JOYW1lPgogICAgICA8Z2l2ZW5OYW1lPlNhbXVlbCBMLjwvZ2l2ZW5OYW1lPgogICAgICA8ZmFtaWx5TmFtZT5CcmF1bnN0ZWluPC9mYW1pbHlOYW1lPgogICAgPC9jcmVhdG9yPgogICAgPGNyZWF0b3I+CiAgICAgIDxjcmVhdG9yTmFtZSBuYW1lVHlwZT0iUGVyc29uYWwiPldpbGxpYW1zLCBDb2xpbiBQLjwvY3JlYXRvck5hbWU+CiAgICAgIDxnaXZlbk5hbWU+Q29saW4gUC48L2dpdmVuTmFtZT4KICAgICAgPGZhbWlseU5hbWU+V2lsbGlhbXM8L2ZhbWlseU5hbWU+CiAgICA8L2NyZWF0b3I+CiAgICA8Y3JlYXRvcj4KICAgICAgPGNyZWF0b3JOYW1lIG5hbWVUeXBlPSJQZXJzb25hbCI+RG93bGluZywgSm9uYXRoYW4gUC48L2NyZWF0b3JOYW1lPgogICAgICA8Z2l2ZW5OYW1lPkpvbmF0aGFuIFAuPC9naXZlbk5hbWU+CiAgICAgIDxmYW1pbHlOYW1lPkRvd2xpbmc8L2ZhbWlseU5hbWU+CiAgICA8L2NyZWF0b3I+CiAgPC9jcmVhdG9ycz4KICA8dGl0bGVzPgogICAgPHRpdGxlPlF1YW50dW0gSW50ZXJmZXJvbWV0cmljIE9wdGljYWwgTGl0aG9ncmFwaHk6IEV4cGxvaXRpbmcgRW50YW5nbGVtZW50IHRvIEJlYXQgVGhlIERpZmZyYWN0aW9uIExpbWl0PC90aXRsZT4KICA8L3RpdGxlcz4KICA8cHVibGlzaGVyPmFyWGl2PC9wdWJsaXNoZXI+CiAgPHB1YmxpY2F0aW9uWWVhcj4xOTk5PC9wdWJsaWNhdGlvblllYXI+CiAgPHN1YmplY3RzPgogICAgPHN1YmplY3QgeG1sOmxhbmc9ImVuIiBzdWJqZWN0U2NoZW1lPSJhclhpdiI+UXVhbnR1bSBQaHlzaWNzIChxdWFudC1waCk8L3N1YmplY3Q+CiAgICA8c3ViamVjdCBzdWJqZWN0U2NoZW1lPSJGaWVsZHMgb2YgU2NpZW5jZSBhbmQgVGVjaG5vbG9neSAoRk9TKSI+Rk9TOiBQaHlzaWNhbCBzY2llbmNlczwvc3ViamVjdD4KICA8L3N1YmplY3RzPgogIDxkYXRlcz4KICAgIDxkYXRlIGRhdGVUeXBlPSJTdWJtaXR0ZWQiIGRhdGVJbmZvcm1hdGlvbj0idjEiPjE5OTktMTItMTFUMDI6MDM6MjlaPC9kYXRlPgogICAgPGRhdGUgZGF0ZVR5cGU9IlVwZGF0ZWQiIGRhdGVJbmZvcm1hdGlvbj0idjEiPjIwMDktMTItMDFUMDA6MjY6NTVaPC9kYXRlPgogICAgPGRhdGUgZGF0ZVR5cGU9IlN1Ym1pdHRlZCIgZGF0ZUluZm9ybWF0aW9uPSJ2MiI+MjAwMC0wNS0wNFQwMDowNjo1MFo8L2RhdGU+CiAgICA8ZGF0ZSBkYXRlVHlwZT0iVXBkYXRlZCIgZGF0ZUluZm9ybWF0aW9uPSJ2MiI+MjAxMC0wNC0wOVQwMDowMTowM1o8L2RhdGU+CiAgICA8ZGF0ZSBkYXRlVHlwZT0iQXZhaWxhYmxlIiBkYXRlSW5mb3JtYXRpb249InYxIj4xOTk5LTEyPC9kYXRlPgogIDwvZGF0ZXM+CiAgPHJlc291cmNlVHlwZSByZXNvdXJjZVR5cGVHZW5lcmFsPSJUZXh0Ij5BcnRpY2xlPC9yZXNvdXJjZVR5cGU+CiAgPHJlbGF0ZWRJZGVudGlmaWVycz4KICAgIDxyZWxhdGVkSWRlbnRpZmllciByZWxhdGVkSWRlbnRpZmllclR5cGU9IkRPSSIgcmVsYXRpb25UeXBlPSJJc1ZlcnNpb25PZiI+MTAuMTEwMy9QaHlzUmV2TGV0dC44NS4yNzMzPC9yZWxhdGVkSWRlbnRpZmllcj4KICA8L3JlbGF0ZWRJZGVudGlmaWVycz4KICA8dmVyc2lvbj4yPC92ZXJzaW9uPgogIDxyaWdodHNMaXN0PgogICAgPHJpZ2h0cyByaWdodHNVUkk9Imh0dHA6Ly9hcnhpdi5vcmcvbGljZW5zZXMvYXNzdW1lZC0xOTkxLTIwMDMvIj5Bc3N1bWVkIGFyWGl2Lm9yZyBwZXJwZXR1YWwsIG5vbi1leGNsdXNpdmUgbGljZW5zZSB0byBkaXN0cmlidXRlIHRoaXMgYXJ0aWNsZSBmb3Igc3VibWlzc2lvbnMgbWFkZSBiZWZvcmUgSmFudWFyeSAyMDA0PC9yaWdodHM+CiAgPC9yaWdodHNMaXN0PgogIDxkZXNjcmlwdGlvbnM+CiAgICA8ZGVzY3JpcHRpb24gZGVzY3JpcHRpb25UeXBlPSJBYnN0cmFjdCI+Q2xhc3NpY2FsLCBpbnRlcmZlcm9tZXRyaWMsIG9wdGljYWwgbGl0aG9ncmFwaHkgaXMgZGlmZnJhY3Rpb24gbGltaXRlZCB0byB3cml0aW5nIGZlYXR1cmVzIG9mIGEgc2l6ZSBsYW1iZGEvMiBvciBncmVhdGVyLCB3aGVyZSBsYW1iZGEgaXMgdGhlIG9wdGljYWwgd2F2ZWxlbmd0aC4gVXNpbmcgbm9uY2xhc3NpY2FsIHBob3RvbiBudW1iZXIgc3RhdGVzLCBlbnRhbmdsZWQgTiBhdCBhIHRpbWUsIHdlIHNob3cgdGhhdCBpdCBpcyBwb3NzaWJsZSB0byB3cml0ZSBmZWF0dXJlcyBvZiBtaW5pbXVtIHNpemUgbGFtYmRhLygyTikgaW4gYW4gTi1waG90b24gYWJzb3JiaW5nIHN1YnN0cmF0ZS4gVGhpcyByZXN1bHQgc3VycGFzc2VzIHRoZSB1c3VhbCBjbGFzc2ljYWwgZGlmZnJhY3Rpb24gbGltaXQgYnkgYSBmYWN0b3Igb2YgTi4gU2luY2UgdGhlIG51bWJlciBvZiBmZWF0dXJlcyB0aGF0IGNhbiBiZSBldGNoZWQgb24gYSB0d28tZGltZW5zaW9uYWwgc3VyZmFjZSBzY2FsZXMgaW52ZXJzZWx5IGFzIHRoZSBzcXVhcmUgb2YgdGhlIGZlYXR1cmUgc2l6ZSwgdGhpcyBhbGxvd3Mgb25lIHRvIHdyaXRlIGEgZmFjdG9yIG9mIE5eMiBtb3JlIGVsZW1lbnRzIG9uIGEgc2VtaWNvbmR1Y3RvciBjaGlwLiBBIGZhY3RvciBvZiBOID0gMiBjYW4gYmUgYWNoaWV2ZWQgZWFzaWx5IHdpdGggZW50YW5nbGVkIHBob3RvbiBwYWlycyBnZW5lcmF0ZWQgZnJvbSBvcHRpY2FsIHBhcmFtZXRyaWMgZG9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