{"data":{"id":"10.48550/arxiv.physics/0608113","type":"dois","attributes":{"doi":"10.48550/arxiv.physics/0608113","prefix":"10.48550","suffix":"arxiv.physics/0608113","identifiers":[{"identifier":"physics/0608113","identifierType":"arXiv"}],"alternateIdentifiers":[{"alternateIdentifierType":"arXiv","alternateIdentifier":"physics/0608113"}],"creators":[{"name":"Bol'shakov, Alexander A.","nameType":"Personal","givenName":"Alexander A.","familyName":"Bol'shakov","affiliation":[],"nameIdentifiers":[]},{"name":"Cruden, Brett A.","nameType":"Personal","givenName":"Brett A.","familyName":"Cruden","affiliation":[],"nameIdentifiers":[]},{"name":"Sharma, Surendra P.","nameType":"Personal","givenName":"Surendra P.","familyName":"Sharma","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Sensor for monitoring plasma parameters"}],"publisher":"arXiv","container":{},"publicationYear":2006,"subjects":[{"lang":"en","subject":"Plasma Physics (physics.plasm-ph)","subjectScheme":"arXiv"},{"lang":"en","subject":"Instrumentation and Detectors (physics.ins-det)","subjectScheme":"arXiv"},{"lang":"en","subject":"Optics (physics.optics)","subjectScheme":"arXiv"},{"subject":"FOS: Physical sciences","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Physical sciences","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"}],"contributors":[],"dates":[{"date":"2006-08-10T08:32:00Z","dateType":"Submitted","dateInformation":"v1"},{"date":"2006-08","dateType":"Available","dateInformation":"v1"},{"date":"2006","dateType":"Issued"}],"language":null,"types":{"ris":"RPRT","bibtex":"article","citeproc":"article-journal","schemaOrg":"ScholarlyArticle","resourceType":"Article","resourceTypeGeneral":"Text"},"relatedIdentifiers":[{"relationType":"IsVersionOf","relatedIdentifier":"10.1117/12.528991","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":[],"formats":[],"version":"1","rightsList":[{"rights":"Assumed arXiv.org perpetual, non-exclusive license to distribute this article for submissions made before January 2004","rightsUri":"http://arxiv.org/licenses/assumed-1991-2003/"}],"descriptions":[{"description":"A spectrally tunable VCSEL (vertical cavity surface-emitting laser) was used as part of sensing hardware for measurements of the radial-integrated gas temperature inside an inductively coupled plasma reactor. The data were obtained by profiling the Doppler-broadened absorption of metastable Ar atoms at 763.51 nm in argon and argon/nitrogen plasmas (3, 45, and 90% N2 in Ar) at pressure 0.5-70 Pa and inductive power of 100 and 300 W. The results were compared to rotational temperature derived from the N2 emission at the (0,0) transition of the C - B system. The differences in integrated rotational and Doppler temperatures were attributed to non-uniform spatial distributions of both temperature and thermometric species (Ar* and N2*) that varied depending on conditions. A two-dimensional, two-temperature fluid plasma simulation was employed to explain these differences. This work should facilitate further development of a miniature sensor for non-intrusive acquisition of data (temperature and densities of multiple plasma species) during micro- and nano-fabrication plasma processing, thus enabling the diagnostic-assisted continuous optimization and advanced control over the processes. Such sensors would also enable tracking the origins and pathways of damaging contaminants, thereby providing real-time feedback for adjustment of processes. Our work serves as an example of how two line-of-sight integrated temperatures derived from different thermometric species make it possible to characterize the radial non-uniformity of the plasma.","descriptionType":"Abstract"},{"description":"Presented at the Photonics West conference, Lasers and Applications in Science and Technology, San Jose, CA, January 2004. This version gives a more detailed introduction on diode lasers as diagnostic tool for micro/nano-fabrication. A follow-up paper published in Plasma Sources Sci. Technol., v.13, 691-700 (2004) featured improvements in plasma simulation","descriptionType":"Other"}],"geoLocations":[],"fundingReferences":[],"xml":"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