{"data":{"id":"10.48550/arxiv.2012.04789","type":"dois","attributes":{"doi":"10.48550/arxiv.2012.04789","prefix":"10.48550","suffix":"arxiv.2012.04789","identifiers":[{"identifier":"2012.04789","identifierType":"arXiv"}],"alternateIdentifiers":[{"alternateIdentifierType":"arXiv","alternateIdentifier":"2012.04789"}],"creators":[{"name":"Si, Mengwei","nameType":"Personal","givenName":"Mengwei","familyName":"Si","affiliation":[],"nameIdentifiers":[]},{"name":"Lin, Zehao","nameType":"Personal","givenName":"Zehao","familyName":"Lin","affiliation":[],"nameIdentifiers":[]},{"name":"Charnas, Adam","nameType":"Personal","givenName":"Adam","familyName":"Charnas","affiliation":[],"nameIdentifiers":[]},{"name":"Ye, Peide D.","nameType":"Personal","givenName":"Peide D.","familyName":"Ye","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Scaled Atomic-Layer-Deposited Indium Oxide Nanometer Transistors with Maximum Drain Current Exceeding 2 A/mm at Drain Voltage of 0.7 V"}],"publisher":"arXiv","container":{},"publicationYear":2020,"subjects":[{"lang":"en","subject":"Materials Science (cond-mat.mtrl-sci)","subjectScheme":"arXiv"},{"lang":"en","subject":"Mesoscale and Nanoscale Physics (cond-mat.mes-hall)","subjectScheme":"arXiv"},{"lang":"en","subject":"Applied Physics (physics.app-ph)","subjectScheme":"arXiv"},{"subject":"FOS: Physical sciences","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Physical sciences","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"}],"contributors":[],"dates":[{"date":"2020-12-08T23:34:06Z","dateType":"Submitted","dateInformation":"v1"},{"date":"2021-02-24T14:43:34Z","dateType":"Updated","dateInformation":"v1"},{"date":"2020-12","dateType":"Available","dateInformation":"v1"},{"date":"2020","dateType":"Issued"}],"language":null,"types":{"ris":"RPRT","bibtex":"article","citeproc":"article-journal","schemaOrg":"ScholarlyArticle","resourceType":"Article","resourceTypeGeneral":"Text"},"relatedIdentifiers":[{"relationType":"IsVersionOf","relatedIdentifier":"10.1109/led.2020.3043430","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":[],"formats":[],"version":"1","rightsList":[{"rights":"Creative Commons Attribution 4.0 International","rightsUri":"https://creativecommons.org/licenses/by/4.0/legalcode","schemeUri":"https://spdx.org/licenses/","rightsIdentifier":"cc-by-4.0","rightsIdentifierScheme":"SPDX"}],"descriptions":[{"description":"In this work, we demonstrate scaled back-end-of-line (BEOL) compatible indium oxide (In2O3) transistors by atomic layer deposition (ALD) with channel thickness (Tch) of 1.0-1.5 nm, channel length (Lch) down to 40 nm, and equivalent oxide thickness (EOT) of 2.1 nm, with record high drain current of 2.0 A/mm at VDS of 0.7 V among all oxide semiconductors. Enhancement-mode In2O3 transistors with ID over 1.0 A/mm at VDS of 1 V are also achieved by controlling the channel thickness down to 1.0 nm at atomic layer scale. Such high current density in a relatively low mobility amorphous oxide semiconductor is understood by the formation of high density 2D channel beyond 4E13 /cm2 at HfO2/In2O3 oxide/oxide interface.","descriptionType":"Abstract"},{"description":"14 pages, 6 figures, to be published in IEEE Electron Device Letters","descriptionType":"Other"}],"geoLocations":[],"fundingReferences":[],"xml":"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","url":"https://arxiv.org/abs/2012.04789","contentUrl":null,"metadataVersion":0,"schemaVersion":"http://datacite.org/schema/kernel-4","source":"mds","isActive":true,"state":"findable","reason":null,"viewCount":0,"viewsOverTime":[],"do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