{"data":{"id":"10.48550/arxiv.2011.15061","type":"dois","attributes":{"doi":"10.48550/arxiv.2011.15061","prefix":"10.48550","suffix":"arxiv.2011.15061","identifiers":[{"identifier":"2011.15061","identifierType":"arXiv"}],"alternateIdentifiers":[{"alternateIdentifierType":"arXiv","alternateIdentifier":"2011.15061"}],"creators":[{"name":"Bosch, D.","nameType":"Personal","givenName":"D.","familyName":"Bosch","affiliation":[],"nameIdentifiers":[]},{"name":"Alba, P. Acosta","nameType":"Personal","givenName":"P. Acosta","familyName":"Alba","affiliation":[],"nameIdentifiers":[]},{"name":"Kerdiles, S.","nameType":"Personal","givenName":"S.","familyName":"Kerdiles","affiliation":[],"nameIdentifiers":[]},{"name":"Benevent, V.","nameType":"Personal","givenName":"V.","familyName":"Benevent","affiliation":[],"nameIdentifiers":[]},{"name":"Perrot, C.","nameType":"Personal","givenName":"C.","familyName":"Perrot","affiliation":[],"nameIdentifiers":[]},{"name":"Lassarre, J.","nameType":"Personal","givenName":"J.","familyName":"Lassarre","affiliation":[],"nameIdentifiers":[]},{"name":"Richy, J.","nameType":"Personal","givenName":"J.","familyName":"Richy","affiliation":[],"nameIdentifiers":[]},{"name":"Lacord, J.","nameType":"Personal","givenName":"J.","familyName":"Lacord","affiliation":[],"nameIdentifiers":[]},{"name":"Sklenard, B.","nameType":"Personal","givenName":"B.","familyName":"Sklenard","affiliation":[],"nameIdentifiers":[]},{"name":"Brunet, L.","nameType":"Personal","givenName":"L.","familyName":"Brunet","affiliation":[],"nameIdentifiers":[]},{"name":"Batude, P.","nameType":"Personal","givenName":"P.","familyName":"Batude","affiliation":[],"nameIdentifiers":[]},{"name":"Fenouillet-Beranger, C.","nameType":"Personal","givenName":"C.","familyName":"Fenouillet-Beranger","affiliation":[],"nameIdentifiers":[]},{"name":"Lattard, D.","nameType":"Personal","givenName":"D.","familyName":"Lattard","affiliation":[],"nameIdentifiers":[]},{"name":"Colinge, J. P.","nameType":"Personal","givenName":"J. P.","familyName":"Colinge","affiliation":[],"nameIdentifiers":[]},{"name":"Balestra, F.","nameType":"Personal","givenName":"F.","familyName":"Balestra","affiliation":[],"nameIdentifiers":[]},{"name":"Andrieu, F.","nameType":"Personal","givenName":"F.","familyName":"Andrieu","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Laser Processing For 3D Junctionless Transistor Fabrication"}],"publisher":"arXiv","container":{},"publicationYear":2020,"subjects":[{"lang":"en","subject":"Applied Physics (physics.app-ph)","subjectScheme":"arXiv"},{"subject":"FOS: Physical sciences","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Physical sciences","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"}],"contributors":[],"dates":[{"date":"2020-11-30T17:58:28Z","dateType":"Submitted","dateInformation":"v1"},{"date":"2020-12-01T01:51:21Z","dateType":"Updated","dateInformation":"v1"},{"date":"2020-11","dateType":"Available","dateInformation":"v1"},{"date":"2020","dateType":"Issued"}],"language":null,"types":{"ris":"GEN","bibtex":"misc","citeproc":"article","schemaOrg":"CreativeWork","resourceType":"Article","resourceTypeGeneral":"Preprint"},"relatedIdentifiers":[],"relatedItems":[],"sizes":[],"formats":[],"version":"1","rightsList":[{"rights":"arXiv.org perpetual, non-exclusive license","rightsUri":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/"}],"descriptions":[{"description":"To take fully advantage of Junctionless transistor (JLT) low-cost and low-temperature features we investigate a 475 degC process to create onto a wafer a thin poly-Si layer on insulator. We fabricated a 13nm doped (Phosphorous, 1E19 at/cm3) poly-silicon film featuring excellent roughness values (Rmax= 1.6nm and RMS=0.2nm). Guidelines for grain size optimization using nanosecond (ns) laser annealing are given.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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