{"data":{"id":"10.48550/arxiv.1912.03326","type":"dois","attributes":{"doi":"10.48550/arxiv.1912.03326","prefix":"10.48550","suffix":"arxiv.1912.03326","identifiers":[{"identifier":"1912.03326","identifierType":"arXiv"}],"alternateIdentifiers":[{"alternateIdentifierType":"arXiv","alternateIdentifier":"1912.03326"}],"creators":[{"name":"Wu, Dachuan","nameType":"Personal","givenName":"Dachuan","familyName":"Wu","affiliation":[],"nameIdentifiers":[]},{"name":"Yi, Yasha","nameType":"Personal","givenName":"Yasha","familyName":"Yi","affiliation":[],"nameIdentifiers":[]},{"name":"Zhang, Yuxiao","nameType":"Personal","givenName":"Yuxiao","familyName":"Zhang","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"High efficiency end-fire 3-D optical phased array based on multi-layers Si3N4/SiO2 platform"}],"publisher":"arXiv","container":{},"publicationYear":2019,"subjects":[{"lang":"en","subject":"Applied Physics (physics.app-ph)","subjectScheme":"arXiv"},{"lang":"en","subject":"Optics (physics.optics)","subjectScheme":"arXiv"},{"subject":"FOS: Physical sciences","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Physical sciences","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"}],"contributors":[],"dates":[{"date":"2019-11-26T17:08:00Z","dateType":"Submitted","dateInformation":"v1"},{"date":"2020-04-22T13:40:55Z","dateType":"Updated","dateInformation":"v1"},{"date":"2019-12","dateType":"Available","dateInformation":"v1"},{"date":"2019","dateType":"Issued"}],"language":null,"types":{"ris":"RPRT","bibtex":"article","citeproc":"article-journal","schemaOrg":"ScholarlyArticle","resourceType":"Article","resourceTypeGeneral":"Text"},"relatedIdentifiers":[{"relationType":"IsVersionOf","relatedIdentifier":"10.1364/ao.382962","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":[],"formats":[],"version":"1","rightsList":[{"rights":"arXiv.org perpetual, non-exclusive license","rightsUri":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/"}],"descriptions":[{"description":"Beam steering device such as optical phased array (OPA) is a key component in applications of solid-state Lidar and wireless communication. The traditional single-layer optical phased array (OPA) results in a significant energy loss due to the substrate leakage caused by the downward coupling from the grating coupler structure. In this work we have investigated a structure based on multi-layers Si3N4/SiO2 platform that can form a 3-D OPA to emit the light from the edge of the device with high efficiency, a 2-D converged out-coupling beam will be end-fired to the air. The high efficiency and wide horizontal beam steering are demonstrated numerically, the influence of vertical cross-talk, the delay length, number of waveguide layers, and the fabrication feasibility are also discussed.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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","url":"https://arxiv.org/abs/1912.03326","contentUrl":null,"metadataVersion":0,"schemaVersion":"http://datacite.org/schema/kernel-4","source":"mds","isActive":true,"state":"findable","reason":null,"viewCount":0,"viewsOverTime":[],"downloadCount":0,"downloadsOverTime":[],"referenceCount":0,"citationCount":0,"citationsOverTime":[],"partCount":0,"partOfCount":0,"versionCount":0,"versionOfCount":0,"created":"2022-02-26T21:36:56.000Z","registered":"2022-02-26T21:36:57.000Z","published":"2019","updated":"2022-02-26T21:36:57.000Z"},"relationships":{"client":{"data":{"id":"arxiv.content","type":"clients"}},"provider":{"data":{"id":"arxiv","type":"providers"}},"media":{"data":{"id":"10.48550/arxiv.1912.03326","type":"media"}},"references":{"data":[]},"citations":{"data":[]},"parts":{"data":[]},"partOf":{"data":[]},"versi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