{"data":{"id":"10.48550/arxiv.1610.09492","type":"dois","attributes":{"doi":"10.48550/arxiv.1610.09492","prefix":"10.48550","suffix":"arxiv.1610.09492","identifiers":[{"identifier":"1610.09492","identifierType":"arXiv"}],"alternateIdentifiers":[{"alternateIdentifierType":"arXiv","alternateIdentifier":"1610.09492"}],"creators":[{"name":"Schröder, Tim","nameType":"Personal","givenName":"Tim","familyName":"Schröder","affiliation":[],"nameIdentifiers":[]},{"name":"Trusheim, Matthew E.","nameType":"Personal","givenName":"Matthew E.","familyName":"Trusheim","affiliation":[],"nameIdentifiers":[]},{"name":"Walsh, Michael","nameType":"Personal","givenName":"Michael","familyName":"Walsh","affiliation":[],"nameIdentifiers":[]},{"name":"Li, Luozhou","nameType":"Personal","givenName":"Luozhou","familyName":"Li","affiliation":[],"nameIdentifiers":[]},{"name":"Zheng, Jiabao","nameType":"Personal","givenName":"Jiabao","familyName":"Zheng","affiliation":[],"nameIdentifiers":[]},{"name":"Schukraft, Marco","nameType":"Personal","givenName":"Marco","familyName":"Schukraft","affiliation":[],"nameIdentifiers":[]},{"name":"Pacheco, Jose L.","nameType":"Personal","givenName":"Jose L.","familyName":"Pacheco","affiliation":[],"nameIdentifiers":[]},{"name":"Camacho, Ryan M.","nameType":"Personal","givenName":"Ryan M.","familyName":"Camacho","affiliation":[],"nameIdentifiers":[]},{"name":"Bielejec, Edward S.","nameType":"Personal","givenName":"Edward S.","familyName":"Bielejec","affiliation":[],"nameIdentifiers":[]},{"name":"Sipahigil, Alp","nameType":"Personal","givenName":"Alp","familyName":"Sipahigil","affiliation":[],"nameIdentifiers":[]},{"name":"Evans, Ruffin E.","nameType":"Personal","givenName":"Ruffin E.","familyName":"Evans","affiliation":[],"nameIdentifiers":[]},{"name":"Sukachev, Denis D.","nameType":"Personal","givenName":"Denis D.","familyName":"Sukachev","affiliation":[],"nameIdentifiers":[]},{"name":"Nguyen, Christian T.","nameType":"Personal","givenName":"Christian T.","familyName":"Nguyen","affiliation":[],"nameIdentifiers":[]},{"name":"Lukin, Mikhail D.","nameType":"Personal","givenName":"Mikhail D.","familyName":"Lukin","affiliation":[],"nameIdentifiers":[]},{"name":"Englund, Dirk","nameType":"Personal","givenName":"Dirk","familyName":"Englund","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Scalable Focused Ion Beam Creation of Nearly Lifetime-Limited Single Quantum Emitters in Diamond Nanostructures"}],"publisher":"arXiv","container":{},"publicationYear":2016,"subjects":[{"lang":"en","subject":"Quantum Physics (quant-ph)","subjectScheme":"arXiv"},{"lang":"en","subject":"Mesoscale and Nanoscale Physics (cond-mat.mes-hall)","subjectScheme":"arXiv"},{"lang":"en","subject":"Optics (physics.optics)","subjectScheme":"arXiv"},{"subject":"FOS: Physical sciences","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Physical sciences","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"}],"contributors":[],"dates":[{"date":"2016-10-29T11:56:20Z","dateType":"Submitted","dateInformation":"v1"},{"date":"2017-06-28T13:36:15Z","dateType":"Updated","dateInformation":"v1"},{"date":"2016-10","dateType":"Available","dateInformation":"v1"},{"date":"2016","dateType":"Issued"}],"language":null,"types":{"ris":"RPRT","bibtex":"article","citeproc":"article-journal","schemaOrg":"ScholarlyArticle","resourceType":"Article","resourceTypeGeneral":"Text"},"relatedIdentifiers":[{"relationType":"IsVersionOf","relatedIdentifier":"10.1038/ncomms15376","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":[],"formats":[],"version":"1","rightsList":[{"rights":"arXiv.org perpetual, non-exclusive license","rightsUri":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/"}],"descriptions":[{"description":"The controlled creation of defect center---nanocavity systems is one of the outstanding challenges for efficiently interfacing spin quantum memories with photons for photon-based entanglement operations in a quantum network. Here, we demonstrate direct, maskless creation of atom-like single silicon-vacancy (SiV) centers in diamond nanostructures via focused ion beam implantation with $\\sim 32$ nm lateral precision and $\u0026lt; 50$ nm positioning accuracy relative to a nanocavity. Moreover, we determine the Si+ ion to SiV center conversion yield to $\\sim 2.5\\%$ and observe a 10-fold conversion yield increase by additional electron irradiation. We extract inhomogeneously broadened ensemble emission linewidths of $\\sim 51$ GHz, and close to lifetime-limited single-emitter transition linewidths down to $126 \\pm13$ MHz corresponding to $\\sim 1.4$-times the natural linewidth. This demonstration of deterministic creation of optically coherent solid-state single quantum systems is an important step towards development of scalable quantum optical devices.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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