{"data":{"id":"10.48550/arxiv.1408.5829","type":"dois","attributes":{"doi":"10.48550/arxiv.1408.5829","prefix":"10.48550","suffix":"arxiv.1408.5829","identifiers":[{"identifier":"1408.5829","identifierType":"arXiv"}],"alternateIdentifiers":[{"alternateIdentifierType":"arXiv","alternateIdentifier":"1408.5829"}],"creators":[{"name":"Tolpygo, Sergey K.","nameType":"Personal","givenName":"Sergey K.","familyName":"Tolpygo","affiliation":[],"nameIdentifiers":[]},{"name":"Bolkhovsky, Vladimir","nameType":"Personal","givenName":"Vladimir","familyName":"Bolkhovsky","affiliation":[],"nameIdentifiers":[]},{"name":"Weir, Terence J.","nameType":"Personal","givenName":"Terence J.","familyName":"Weir","affiliation":[],"nameIdentifiers":[]},{"name":"Johnson, Leonard M.","nameType":"Personal","givenName":"Leonard M.","familyName":"Johnson","affiliation":[],"nameIdentifiers":[]},{"name":"Gouker, Mark A.","nameType":"Personal","givenName":"Mark A.","familyName":"Gouker","affiliation":[],"nameIdentifiers":[]},{"name":"Oliver, William D.","nameType":"Personal","givenName":"William D.","familyName":"Oliver","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al-AlOx/Nb Josephson Junctions for VLSI Circuits"}],"publisher":"arXiv","container":{},"publicationYear":2014,"subjects":[{"lang":"en","subject":"Superconductivity (cond-mat.supr-con)","subjectScheme":"arXiv"},{"subject":"FOS: Physical sciences","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"FOS: Physical sciences","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"}],"contributors":[],"dates":[{"date":"2014-08-25T16:40:09Z","dateType":"Submitted","dateInformation":"v1"},{"date":"2014-08-26T00:17:08Z","dateType":"Updated","dateInformation":"v1"},{"date":"2014-12-19T23:29:21Z","dateType":"Submitted","dateInformation":"v2"},{"date":"2016-02-12T01:01:08Z","dateType":"Updated","dateInformation":"v2"},{"date":"2014-08","dateType":"Available","dateInformation":"v1"},{"date":"2014","dateType":"Issued"}],"language":null,"types":{"ris":"RPRT","bibtex":"article","citeproc":"article-journal","schemaOrg":"ScholarlyArticle","resourceType":"Article","resourceTypeGeneral":"Text"},"relatedIdentifiers":[{"relationType":"IsVersionOf","relatedIdentifier":"10.1109/tasc.2014.2374836","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":[],"formats":[],"version":"2","rightsList":[{"rights":"arXiv.org perpetual, non-exclusive license","rightsUri":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/"}],"descriptions":[{"description":"A fabrication process for Nb/Al-AlOx/Nb Josephson junctions (JJs) with sizes down to 200 nm has been developed on a 200-mm-wafer tool set typical for CMOS foundry. This process is the core of several nodes of a roadmap for fully-planarized fabrication processes for superconductor integrated circuits with 4, 8, and 10 niobium layers developed at MIT Lincoln Laboratory. The process utilizes 248 nm photolithography, anodization, high-density plasma etching, and chemical mechanical polishing (CMP) for planarization of SiO$_2$ interlayer dielectric. JJ electric properties and statistics such as on-chip and wafer spreads of critical current, $I_c$, normal-state conductance, $G_N$, and run-to-run reproducibility have been measured on 200-mm wafers over a broad range of JJ diameters from 200 nm to 1500 nm and critical current densities, $J_c$, from 10 kA/$cm^2$ to 50 kA/$cm^2$ where the JJs become self-shunted. Diffraction-limited photolithography of JJs is discussed. A relationship between JJ mask size, JJ size on wafer, and the minimum printable size for coherent and partially coherent illumination has been worked out. The $G_N$ and $I_c$ spreads obtained have been found to be mainly caused by variations of the JJ areas and agree with the model accounting for an enhancement of mask errors near the diffraction-limited minimum printable size of JJs. $I_c$ and $G_N$ spreads from 0.8% to 3% have been obtained for JJs with sizes from 1500 nm down to 500 nm. The spreads increase to about 8% for 200-nm JJs. Prospects for circuit densities \u0026gt; $10^6$ JJ/$cm^2$ and 193-nm photolithography for JJ definition are discussed.","descriptionType":"Abstract"},{"description":"13 pages, 16 figures, 62 references. Presented at Applied Superconductivity Conference, ASC 2014, Charlotte, NC, USA, August 10-15, 2014","descriptionType":"Other"}],"geoLocations":[],"fundingReferences":[],"xml":"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