{"data":{"id":"10.4121/601b06bf-d15b-46f4-b2fa-4e9922d1e36e","type":"dois","attributes":{"doi":"10.4121/601b06bf-d15b-46f4-b2fa-4e9922d1e36e","prefix":"10.4121","suffix":"601b06bf-d15b-46f4-b2fa-4e9922d1e36e","identifiers":[],"alternateIdentifiers":[],"creators":[{"name":"van de Poll, Mike","nameType":"Personal","givenName":"Mike","familyName":"van de Poll","nameIdentifiers":[{"nameIdentifier":"0000-0001-8161-3658","nameIdentifierScheme":"https://orcid.org/"}],"affiliation":[]},{"name":"Macco, Bart","nameType":"Personal","givenName":"Bart","familyName":"Macco","nameIdentifiers":[{"nameIdentifier":"0000-0003-1197-441X","nameIdentifierScheme":"https://orcid.org/"}],"affiliation":[]},{"name":"Kessels, Erwin","givenName":"Erwin","familyName":"Kessels","affiliation":[],"nameIdentifiers":[]},{"name":"Poodt, Paul","nameType":"Personal","givenName":"Paul","familyName":"Poodt","nameIdentifiers":[{"nameIdentifier":"0000-0002-1149-4312","nameIdentifierScheme":"https://orcid.org/"}],"affiliation":[]},{"name":"van den Bruele, Fieke","nameType":"Personal","givenName":"Fieke","familyName":"van den Bruele","nameIdentifiers":[{"nameIdentifier":"0000-0002-8188-296X","nameIdentifierScheme":"https://orcid.org/"}],"affiliation":[]},{"name":"Verheijen, Marcel","nameType":"Personal","givenName":"Marcel","familyName":"Verheijen","nameIdentifiers":[{"nameIdentifier":"0000-0002-8749-7755","nameIdentifierScheme":"https://orcid.org/"}],"affiliation":[]},{"name":"Jain, Hardik","givenName":"Hardik","familyName":"Jain","affiliation":[],"nameIdentifiers":[]},{"name":"Shen, Jie","givenName":"Jie","familyName":"Shen","affiliation":[],"nameIdentifiers":[]},{"name":"Utriainen, Mikko","givenName":"Mikko","familyName":"Utriainen","affiliation":[],"nameIdentifiers":[]},{"name":"Hilfiker, James","nameType":"Personal","givenName":"James","familyName":"Hilfiker","nameIdentifiers":[{"nameIdentifier":"000-0002-4874-5429","nameIdentifierScheme":"https://orcid.org/"}],"affiliation":[]}],"titles":[{"title":"Processed and raw data of papers published as part of the NWO OTP project \"Spatial ALD: More Materials, More Demanding Applications\""}],"publisher":"4TU.ResearchData","container":{},"publicationYear":2026,"subjects":[{"subject":"Nanotechnology","subjectScheme":"Australian and New Zealand Standard Research Classification (ANZSRC), 2008","classificationCode":"1007"},{"subject":"FOS: Nanotechnology","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"Atomic, Molecular, Nuclear, Particle and Plasma Physics","subjectScheme":"Australian and New Zealand Standard Research Classification (ANZSRC), 2008","classificationCode":"0202"},{"subject":"FOS: Physical sciences","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"Physical Sciences","subjectScheme":"Australian and New Zealand Standard Research Classification (ANZSRC), 2008","classificationCode":"02"},{"subject":"Technology","subjectScheme":"Australian and New Zealand Standard Research Classification (ANZSRC), 2008","classificationCode":"10"},{"subject":"Atomic Layer Deposition"},{"subject":"thin films"},{"subject":"Material Science"},{"subject":"Electrolysis"}],"contributors":[{"name":"TU Eindhoven, Department of Applied Physics and Science Education, Plasma and Materials Processing","nameType":"Organizational","affiliation":[],"contributorType":"Other","nameIdentifiers":[]}],"dates":[{"date":"2026-03-19","dateType":"Issued"}],"language":"en","types":{"ris":"DATA","bibtex":"misc","citeproc":"dataset","schemaOrg":"Dataset","resourceType":"Dataset","resourceTypeGeneral":"Dataset"},"relatedIdentifiers":[{"relationType":"IsSupplementTo","relatedIdentifier":"10.1063/5.0168768","relatedIdentifierType":"DOI"},{"relationType":"References","relatedIdentifier":"https://doi.org/10.1063/5.0168768","relatedIdentifierType":"URL"},{"relationType":"References","relatedIdentifier":"https://doi.org/10.1021/acs.jpcc.4c08281","relatedIdentifierType":"URL"},{"relationType":"References","relatedIdentifier":"https://doi.org/10.1021/ACS.JPCC.5C06502","relatedIdentifierType":"URL"},{"relationType":"IsVersionOf","relatedIdentifier":"10.4121/601b06bf-d15b-46f4-b2fa-4e9922d1e36e.v1","relatedIdentifierType":"DOI"}],"relatedItems":[],"sizes":[],"formats":["Origin files/.opju, XPS data/.vgp/.vgd ellipsometry data/.SEsnap image/.jpg"],"version":"1","rightsList":[{"rights":"Creative Commons Attribution 4.0 International","rightsUri":"https://creativecommons.org/licenses/by/4.0/legalcode","schemeUri":"https://spdx.org/licenses/","rightsIdentifier":"cc-by-4.0","rightsIdentifierScheme":"SPDX"}],"descriptions":[{"description":"Processed and raw data of papers published as part of the NWO OTP project \"Spatial ALD: More Materials, More Demanding Applications\". The aim of this project was to investigate fundamental aspects of spatial ALD, such as doping and multicomponent materials, nucleation and growth effects, and conformality in 3D structures, to expand the technique to more materials and more demanding applications. The research was performed at the Eindhoven University of Technology in colaboration with several industrial partners. The data presented here is a part of the raw data and the majority of processed data presented in the three papers that have so far been published as part of this project.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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","url":"https://data.4tu.nl/datasets/601b06bf-d15b-46f4-b2fa-4e9922d1e36e","contentUrl":null,"metadataVersion":0,"schemaVersion":"http://datacite.org/schema/kernel-4","source":"api","isActive":true,"state":"findable","reason":null,"viewCount":0,"viewsOverTime":[],"downloadCount":0,"downloadsOverTime":[],"referenceCount":3,"citationCount":1,"citationsOverTime":[{"year":"2026","total":1}],"partCount":0,"partOfCount":0,"versionCount":0,"versionOfCount":1,"created":"2026-03-19T13:58:28.000Z","registered":"2026-03-19T13:58:29.000Z","published":"2026","updated":"2026-03-19T13:58:29.000Z"},"relationships":{"client":{"data":{"id":"delft.data4tu","type":"clients"}},"provider":{"data":{"id":"scpr","type":"providers"}},"media":{"data":{"id":"10.4121/601b06bf-d15b-46f4-b2fa-4e9922d1e36e","type":"media"}},"references":{"data":[{"id":"10.1021/acs.jpcc.5c06502","type":"dois"},{"id":"10.1063/5.0168768","type":"dois"},{"id":"10.1021/acs.jpcc.4c08281","type":"dois"}]},"citations":{"data":[{"id":"10.1063/5.0168768","type":"dois"}]},"parts":{"data":[]},"partOf":{"data":[]},"versions":{"data":[]},"versionOf":{"data":[{"id":"10.4121/601b06bf-d15b-46f4-b2fa-4e9922d1e36e.v1","type":"dois"}]}}}}