{"data":{"id":"10.13016/m2vh2b","type":"dois","attributes":{"doi":"10.13016/m2vh2b","prefix":"10.13016","suffix":"m2vh2b","identifiers":[],"alternateIdentifiers":[],"creators":[{"name":"Arana-Chavez, David","nameType":"Personal","givenName":"David","familyName":"Arana-Chavez","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"REACTION FACTORIZATION FOR DISTRIBUTED DEPOSITION SYSTEMS: APPLICATION TO COPPER FILM GROWTH"}],"publisher":"Digital Repository at the University of Maryland","container":{},"publicationYear":2015,"subjects":[{"subject":"Chemical engineering","subjectScheme":"pqcontrolled"},{"subject":"FOS: Chemical engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subject":"Chemical vapor deposition","subjectScheme":"pquncontrolled"},{"subject":"Dynamical systems","subjectScheme":"pquncontrolled"},{"subject":"Model reduction","subjectScheme":"pquncontrolled"},{"subject":"Reaction factorization","subjectScheme":"pquncontrolled"},{"subject":"Thin film growth","subjectScheme":"pquncontrolled"}],"contributors":[],"dates":[{"date":"2015","dateType":"Issued"}],"language":"en","types":{"ris":"THES","bibtex":"phdthesis","citeproc":"thesis","schemaOrg":"Thesis","resourceType":"Dissertation","resourceTypeGeneral":"Collection"},"relatedIdentifiers":[],"relatedItems":[],"sizes":[],"formats":[],"version":null,"rightsList":[],"descriptions":[{"description":"A model reduction methodology based on a Gauss-Jordan reaction factoriza-\n\ntion for thin-film deposition reaction systems is developed in this thesis. The fac-\n\ntorization generates a transformation matrix that is used to create a new coordinate\n\nsystem that guides the separation of the deposition process time scales by decoupling\n\nthe net-forward reaction rates to the greatest extent possible. The new coordinate\n\nspace enables recasting the original model as a singular perturbation problem and\n\nconsequently as a semi-explicit system of differential-algebraic equations (DAE) for\n\nthe dominant dynamics in the pseudo-equilibrium limit. Additionally, the factor-\n\nization reveals conserved quantities in the new reaction coordinate system as well\n\nas potential structural problems with the deposition reaction network.\n\nThe reaction factorization methodology is formulated to be suitable for appli-\n\ncation to dynamic, spatially distributed reaction systems. The factorization provides\n\na rigorous pathway to decouple the time evolution and the spatial distributions of\n\ndeposition systems when the dynamics of reactor-scale gas-phase transport are fastrelative to the deposition process. Moreover, the factorization approach provides a\n\nsolution to the problem of formulating Danckwerts-type boundary conditions where\n\ngas-phase equilibrium reactions are important.\n\nThe reaction factorization is used to study the chemical vapor deposition of\n\ncopper on a tubular hot-wall reactor using copper iodide as the Cu precursor. A\n\nfilm-growth mechanism is proposed from experimental observations that the copper\n\nfilms deposited on quartz substrates suggest a Volmer-Weber growth mode. A model\n\nbased on this mechanism is used to track spatial distribution of the average Cu island\n\nsize in the reactor.\n\nThe rate expressions used in the Cu deposition model are determined using\n\nabsolute rate theory. To carry out these calculations in an organized manner, a\n\nlibrary of object-oriented classes are created in the Python programming language.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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","url":"http://hdl.handle.net/1903/17080","contentUrl":null,"metadataVersion":0,"schemaVersion":null,"source":null,"isActive":true,"state":"findable","reason":null,"viewCount":0,"viewsOverTime":[],"downloadCount":0,"downloadsOverTime":[],"referenceCount":0,"citationCount":0,"citationsOverTime":[],"partCount":0,"partOfCount":0,"versionCount":0,"versionOfCount":0,"created":"2015-09-18T05:58:33.000Z","registered":"20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