{"data":{"id":"10.13016/m2r05c","type":"dois","attributes":{"doi":"10.13016/m2r05c","prefix":"10.13016","suffix":"m2r05c","identifiers":[],"alternateIdentifiers":[],"creators":[{"name":"Manno, Michael Vincent","nameType":"Personal","givenName":"Michael Vincent","familyName":"Manno","affiliation":[],"nameIdentifiers":[]}],"titles":[{"title":"On-Chip Thermoelectric Hotspot Cooling"}],"publisher":"Digital Repository at the University of Maryland","container":{},"publicationYear":2015,"subjects":[{"subject":"Mechanical engineering","subjectScheme":"pqcontrolled"},{"subject":"FOS: Mechanical engineering","schemeUri":"http://www.oecd.org/science/inno/38235147.pdf","subjectScheme":"Fields of Science and Technology (FOS)"},{"subjectScheme":"pquncontrolled"}],"contributors":[],"dates":[{"date":"2015","dateType":"Issued"}],"language":"en","types":{"ris":"THES","bibtex":"phdthesis","citeproc":"thesis","schemaOrg":"Thesis","resourceType":"Dissertation","resourceTypeGeneral":"Collection"},"relatedIdentifiers":[],"relatedItems":[],"sizes":[],"formats":[],"version":null,"rightsList":[],"descriptions":[{"description":"Increased power density and non-uniform heat dissipation present a thermal\n\nmanagement challenge in modern electronic devices. The non-homogeneous heating\n\nin chips results in areas of elevated temperature, which even if small and localized,\n\nlimit overall device performance and reliability. In power electronics, hotspot heat\n\nfluxes can be in excess of 1kW/cm2. Although novel package-level and chip-level\n\ncooling systems capable of removing the large amounts of dissipated heat are under\n\ndevelopment, such “global” cooling systems typically reduce the chip temperature \n\nuniformly, leaving the temperature non-uniformity unaddressed. Thus, advanced\n\nhotspot cooling techniques, which provide localized cooling to areas of elevated heat\n\nflux, are required to supplement the new “global” cooling systems and unlock the full\n\npotential of cutting-edge power devices. Thermoelectric coolers have previously been\n\ndemonstrated as an effective method of producing on-demand, localized cooling for\n\nsemiconductor photonic and logic devices. The growing need for the removal of\n\nlocalized hotspots has turned renewed attention to on-chip thermoelectric cooling,\n\nseeking to raise the maximum allowable heat flux of thermoelectrically-cooled\n\nsemiconductor device hotspots.\n\nThis dissertation focused on the numerical and empirical determination of the\n\noperational characteristics and performance limits of two specific thermoelectric\n\nmethods for high heat flux hotspot cooling: monolithic thermoelectric hotspot cooling\n\nand micro-contact enhanced thermoelectric hotspot cooling. The monolithic cooling\n\nconfiguration uses the underlying electronic substrate as the thermoelectric material,\n\neliminating the need for a discrete cooler and its associated thermal interface resistance.\n\nMicro-contact enhanced cooling uses a contact structure to concentrate the cooling\n\nproduced by the thermoelectric module, enabling the direct removal of kW/cm2 level\n\nheat fluxes from on-chip hotspots. To facilitate empirical validation of on-chip\n\nthermoelectric coolers and characterization of advanced thin film thermoelectric\n\ncoolers, it was found necessary to develop a novel laser heating system, using a high power laser and short-focal length optics. The design and use of this illumination\n\nsystem, capable of creating kW/cm2-level, mm-sized hotspots, will also be described.","descriptionType":"Abstract"}],"geoLocations":[],"fundingReferences":[],"xml":"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","url":"http://hdl.handle.net/1903/17019","contentUrl":null,"metadataVersion":0,"schemaVersion":"http://datacite.org/schema/kernel-2.2","source":null,"isActive":true,"state":"findable","reason":null,"viewCount":0,"viewsOverTime":[],"downloadCount":0,"downloadsOverTime":[],"referenceCount":0,"citationCount":0,"citationsOverTime":[],"partCount":0,"partOfCount":0,"versionCount":0,"versionOfCount":0,"created":"2015-09-18T05:49:28.000Z","registered":"2015-09-18T05:49:29.000Z","published":"2015","updated":"2020-08-19T20:55:18.000Z"},"relationships":{"client":{"data":{"id":"umd.lib","type":"clients"}},"provider":{"data":{"id":"umd","type":"providers"}},"media":{"data":{"id":"10.13016/m2r05c","type":"media"}},"references":{"data":[]},"citations":{"data":[]},"parts":{"data":[]},"partOf":{"data":[]},"versions":{"data":[]},"versionOf":{"data":[]}}}}